An edition of Characterization and metrology for ULSI technology (1998)

Characterization and metrology for ULSI technology

1998 international conference, Gaithersburg, Maryland, March 1998

by

Characterization and metrology for ULSI techn ...
David G. Seiler
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Last edited by MARC Bot
July 9, 2024 | History
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An edition of Characterization and metrology for ULSI technology (1998)

Characterization and metrology for ULSI technology

1998 international conference, Gaithersburg, Maryland, March 1998

by

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Publish Date
Publisher
American Institute of Physics
Language
English
Pages
960

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Subjects

Congresses, Integrated circuits, Ultra large scale integration, Software

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Edition Availability
Cover of: Characterization and metrology for ULSI technology
Characterization and metrology for ULSI technology: 1998 international conference, Gaithersburg, Maryland, March 1998
1998, American Institute of Physics
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Characterization and Metrology for Ulsi Technology
Characterization and Metrology for Ulsi Technology : 1998 International Conference (AIP Conference Proceedings, Vol. 449)
December 14, 1998, American Institute of Physics
Hardcover in English - 1 edition
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and indexes.
"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref.
Accompanying computer disc contains full text from the book.
System requirements for accompanying computer disc: IBM PC or compatible; hard disk with at least 4 MB free; at least 4 MB RAM; Windows 95 or Windows 3.1.; Acrobat Reader.
System requirements for Macintosh computer disk: Macintosh, Power Mac, or compatible; hard disk with 4 MB free; 2 MB RAM; System 7 or later; Acrobat Reader.
System requirements for Unix computer disk: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.

Published in
Woodbury, NY
Series
AIP conference proceedings,, 449, AIP conference proceedings ;, no. 449.
Genre
Congresses., Congresses, Software.

Classifications

Dewey Decimal Class
621.39/5
Library of Congress
TK7874.76 .C49 1998

The Physical Object

Pagination
xv, 960 p. :
Number of pages
960

ID Numbers

Open Library
OL398677M
ISBN 10
1563967537, 1563968681
LCCN
98087959
OCLC/WorldCat
40618877
Goodreads
2691095

Source records

Scriblio MARC record
Library of Congress MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 9, 2024 Edited by MARC Bot import existing book
November 28, 2020 Edited by MARC Bot import existing book
April 2, 2019 Edited by MARC Bot import existing book
April 9, 2010 Edited by bgimpertBot Added goodreads ID.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record