Textbooks on semiconductor and device fabrication including Device Physics

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  Microchip fabrication

  by Peter Van Zant First published in 1984 — 10 editions work

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  Physics and technology of semiconductor devices

  by A. S. Grove First published in 1967 — 1 edition work

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  Silicon processing for the VLSI era

  by Stanley Wolf First published in 1986 — 2 editions work

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  Introduction to microelectronic fabrication

  by Richard C. Jaeger edition

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  Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition)

  by Richard C. Jaeger edition

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  Physics of semiconductor devices

  by S. M. Sze First published in 1969 — 3 editions work

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