| Record ID | ia:isbn_0819434930_3892 |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/isbn_0819434930_3892/isbn_0819434930_3892_marc.xml |
| Download MARC binary | https://www.archive.org/download/isbn_0819434930_3892/isbn_0819434930_3892_meta.mrc |
LEADER: 01722cam a22003497a 4500
001 00702718
003 DLC
005 20011221103205.0
008 000831s1999 waua b 101 0 eng d
010 $a 00702718
020 $a0819434930
035 $a(OCoLC)ocm43166751
040 $aCUS$cCUS$dDLC
042 $alccopycat
050 00 $aTK7875$b.D48 1999
082 00 $a621.381$221
245 00 $aDevice and process technologies for MEMS and microelectronics :$b27-29 October 1999, Royal Pines Resort, Queensland, Australia /$cKevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.].
260 $aBellingham, Wash., USA :$bSPIE,$cc1999.
300 $avii, 394 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3892
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aPhoton detectors$xDesign and construction$vCongresses.
650 0 $aPhotomechanical processes$vCongresses.
650 0 $aPhotolithography$vCongresses.
700 1 $aChau, Kevin.
700 1 $aDimitrijev, Sima,$d1958-
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aInstitution of Radio and Electronics Engineers, Australia.
710 1 $aQueensland.$bGovernment State Development.
710 2 $aGriffith University Microelectronics Engineering Society.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3892.