An edition of Device and Process Technologies for MEMS and Microelectronics (1999)

Device and process technologies for MEMS and microelectronics

27-29 October 1999, Royal Pines Resort, Queensland, Australia

by

Cover of: Device and process technologies for MEMS and microelectronics by Sima Dimitrijev
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Last edited by MARC Bot
July 9, 2024 | History
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An edition of Device and Process Technologies for MEMS and Microelectronics (1999)

Device and process technologies for MEMS and microelectronics

27-29 October 1999, Royal Pines Resort, Queensland, Australia

by

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English
Pages
394

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Previews available in: English

Subjects

Microelectronics, Microelectromechanical systems, Congresses, Photolithography, Photomechanical processes, Photon detectors, Design and construction
Edition Availability
Cover of: Device and process technologies for MEMS and microelectronics
Device and process technologies for MEMS and microelectronics: 27-29 October 1999, Royal Pines Resort, Queensland, Australia
1999, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 3892, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3892.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7875 .D48 1999, TK7875.D48 1999

The Physical Object

Pagination
vii, 394 p. :
Number of pages
394

ID Numbers

Open Library
OL6898376M
ISBN 10
0819434930
LCCN
00702718
OCLC/WorldCat
43166751
Goodreads
2675561

Source records

Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 9, 2024 Edited by MARC Bot import existing book
July 27, 2023 Edited by ImportBot import existing book
October 8, 2020 Edited by ImportBot import existing book
September 13, 2020 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record