| Record ID | marc_columbia/Columbia-extract-20221130-006.mrc:352452822:1757 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-006.mrc:352452822:1757?format=raw |
LEADER: 01757mam a2200337 a 4500
001 2812029
005 20221013015324.0
008 001127t20002000waua b 101 0 eng d
020 $a0819437441
035 $a(OCoLC)ocm45425433
035 $9ART2378CU
035 $a2812029
040 $aCUS$cCUS$dNNC
090 $aTA418.7$b.O66 2000
245 00 $aOptical metrology roadmap for the semiconductor, optical, and data storage industries :$b30-31 July 2000, San Diego, USA /$cGhanim A. Al-Jumaily, Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash., USA :$bSPIE,$c[2000], ©2000.
300 $aix, 328 pages :$billustrations ;$c28 cm.
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
490 1 $aSPIE proceedings series ;$vv. 4099
504 $aIncludes bibliographical references and index.
650 0 $aOptical measurements$xIndustrial applications$vCongresses.
650 0 $aSurfaces (Technology)$xMeasurement$vCongresses.
650 0 $aOptoelectronic devices$xIndustrial applications$vCongresses.
650 0 $aInformation retrieval$xTechnological innovations$vCongresses.
700 1 $aAl-Jumaily, Ghanim A.$0http://id.loc.gov/authorities/names/n99033765
700 1 $aDuparré, Angela.$0http://id.loc.gov/authorities/names/no2001004265
700 1 $aSingh, Bhanwar.$0http://id.loc.gov/authorities/names/n2003009288
710 2 $aSociety of Photo-optical Instrumentation Engineers.$0http://id.loc.gov/authorities/names/n78088934
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4099.$0http://id.loc.gov/authorities/names/n42030541
852 00 $boff,eng$hTA418.7$i.O684 2000g