An edition of Optical metrology roadmap for the semiconductor, optical, and data storage industries (2000)

Optical metrology roadmap for the semiconductor, optical, and data storage industries

30-31 July 2000, San Diego, USA

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Cover of: Optical metrology roadmap for the semiconductor, optical, and data storage industries by Angela Duparré
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Last edited by MARC Bot
July 15, 2024 | History
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An edition of Optical metrology roadmap for the semiconductor, optical, and data storage industries (2000)

Optical metrology roadmap for the semiconductor, optical, and data storage industries

30-31 July 2000, San Diego, USA

by

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Publish Date
Publisher
SPIE
Language
English
Pages
328

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Previews available in: English

Subjects

Measurement, Optoelectronics, Industrial applications, Optoelectronic devices, Information retrieval, Congresses, Optical measurements, Technological innovations, Surfaces (Technology)
Edition Availability
Cover of: Optical metrology roadmap for the semiconductor, optical, and data storage industries
Optical metrology roadmap for the semiconductor, optical, and data storage industries: 30-31 July 2000, San Diego, USA
2000, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 4099, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4099.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381/045
Library of Congress
TA1750 .O55 2000, TA1750.O55 2000

The Physical Object

Pagination
ix, 328 p. :
Number of pages
328

ID Numbers

Open Library
OL3583400M
ISBN 10
0819437441
LCCN
2002280674
OCLC/WorldCat
45425433
Goodreads
3454712

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 15, 2024 Edited by MARC Bot import existing book
July 28, 2023 Edited by ImportBot import existing book
December 5, 2020 Edited by MARC Bot import existing book
October 8, 2020 Edited by ImportBot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record