| Record ID | marc_loc_2016/BooksAll.2016.part29.utf8:235954457:1474 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part29.utf8:235954457:1474?format=raw |
LEADER: 01474cam a2200337 a 4500
001 2002280674
003 DLC
005 20021122073151.0
008 020506s2000 waua b 101 0 eng d
010 $a 2002280674
035 $a(OCoLC)ocm45425433
040 $aCUS$cCUS$dDLC
042 $alccopycat
020 $a0819437441
050 00 $aTA1750$b.O55 2000
082 00 $a621.381/045$221
245 00 $aOptical metrology roadmap for the semiconductor, optical, and data storage industries :$b30-31 July 2000, San Diego, USA /$cGhanim A. Al-Jumaily, Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash., USA :$bSPIE,$cc2000.
300 $aix, 328 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 4099
504 $aIncludes bibliographical references and index.
650 0 $aOptoelectronics$vCongresses.
650 0 $aOptical measurements$xIndustrial applications$vCongresses.
650 0 $aSurfaces (Technology)$xMeasurement$vCongresses.
650 0 $aOptoelectronic devices$xIndustrial applications$vCongresses.
650 0 $aInformation retrieval$xTechnological innovations$vCongresses.
700 1 $aAl-Jumaily, Ghanim A.
700 1 $aDuparré, Angela.
700 1 $aSingh, Bhanwar.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4099.