An edition of Resolution enhancement techniques in optical lithography (2001)

Resolution enhancement techniques in optical lithography

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Cover of: Resolution enhancement techniques in optical lithography by Alfred Kwok-Kit Wong, Alfred Kwok-Kit Wong
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Last edited by ImportBot
February 12, 2023 | History
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An edition of Resolution enhancement techniques in optical lithography (2001)

Resolution enhancement techniques in optical lithography

by

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Publish Date
Publisher
SPIE Optical Engineering Press, SPIE Publications, Brand: SPIE Publications, SPIE Press
Language
English
Pages
214

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Previews available in: English

Subjects

Design and construcition, Integrated circuits, Microlithography, Design and construction
Edition Availability
Cover of: Resolution enhancement techniques in optical lithography
Resolution enhancement techniques in optical lithography
2001, SPIE Optical Engineering Press, SPIE Publications, Brand: SPIE Publications, SPIE Press
in English
Cover of: Resolution Enhancement Techniques in Optical Lithography
Resolution Enhancement Techniques in Optical Lithography
2001, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references (p. 189-208) and index.

Published in
Bellingham, WA
Series
Tutorial texts in optical engineering -- v. TT 47.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .W647 2001, TK7874.W647 2001

The Physical Object

Pagination
xvii, 214 p. :
Number of pages
214

ID Numbers

Open Library
OL17599045M
Internet Archive
resolutionenhanc0047wong
ISBN 10
0819439959
LCCN
2001020028
OCLC/WorldCat
45879722
Library Thing
359368
Goodreads
3365323

Source records

Oregon Libraries MARC record
Library of Congress MARC record
Better World Books record
harvard_bibliographic_metadata record
amazon.com record
Internet Archive item record

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History

Download catalog record: RDF / JSON
February 12, 2023 Edited by ImportBot import existing book
December 3, 2020 Edited by MARC Bot import existing book
January 22, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page