An edition of Tribology in chemical-mechanical planarization (2005)

Tribology In Chemical-Mechanical Planarization

by , , and

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Cover of: Tribology In Chemical-Mechanical Planarization by Hong Liang, David Craven
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Last edited by MARC Bot
December 14, 2022 | History
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An edition of Tribology in chemical-mechanical planarization (2005)

Tribology In Chemical-Mechanical Planarization

by , , and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
CRC
Language
English
Pages
200

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Subjects
Tribology, Grinding and polishing, Technology: General Issues, Power Tools, Science, Home Improvement / Construction, Science/Mathematics, Engineering - General, Material Science, Technology / Material Science, Chemistry - General, Chemical mechanical planarization, Tribologie (Technologie), Planarisation chimicomécanique, HOUSE & HOME
Edition Availability
Cover of: Tribology in Chemical-Mechanical Planarization
Tribology in Chemical-Mechanical Planarization
2019, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Tribology In Chemical-Mechanical Planarization
Tribology In Chemical-Mechanical Planarization
March 1, 2005, CRC
Hardcover in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Tribology in Chemical-Mechanical Planarization
Tribology in Chemical-Mechanical Planarization
2005, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Tribology in chemical-mechanical planarization
Tribology in chemical-mechanical planarization
2005, Taylor & Francis
in English
Libraries near you: WorldCat
Cover of: Tribology in Chemical-Mechanical Planarization
Tribology in Chemical-Mechanical Planarization
2005, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Tribology in Chemical-Mechanical Planarization
Tribology in Chemical-Mechanical Planarization
2005, Taylor & Francis Group
in English
Libraries near you: WorldCat

Add another edition?

Book Details

First Sentence

"In the microelectronics community, the acronym CMP has been interpreted as either chemical-mechanical polishing or chemical-mechanical planarization."

The Physical Object

Format
Hardcover
Number of pages
200
Dimensions
9.3 x 6.4 x 0.7 inches
Weight
1 pounds

ID Numbers

Open Library
OL8125356M
ISBN 10
0824725670
ISBN 13
9780824725679
Goodreads
2512096

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History

Download catalog record: RDF / JSON
December 14, 2022 Edited by MARC Bot import existing book
December 8, 2020 Edited by MARC Bot import existing book
July 31, 2019 Edited by MARC Bot associate edition with work OL13640198W
January 29, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page