An edition of Nanoimprint lithography (2011)

Nanoimprint lithography

principles, processes and materials

by

Nanoimprint lithography
Hongbo Lan, Hongbo Lan
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Last edited by MARC Bot
November 13, 2020 | History
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An edition of Nanoimprint lithography (2011)

Nanoimprint lithography

principles, processes and materials

by

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Publish Date
Publisher
Nova Science Publishers, Inc.
Language
English
Pages
73

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Subjects

Nanoelectronics, Nanostructures, Microlithography, Nanolithography
Edition Availability
Cover of: Nanoimprint lithography
Nanoimprint lithography: principles, processes and materials
2011, Nova Science Publishers, Inc.
in English

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Book Details

Table of Contents

Principle and fundamental process for NIL
Variations of NIL processes
NIL materials
Prospects and challenges in NIL.

Edition Notes

Includes bibliographical references (p. [61]-68) and index.

Published in
New York

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874.84 .L36 2011, TK7874.84.L36 2011

The Physical Object

Pagination
viii, 73 p. :
Number of pages
73

Edition Identifiers

Open Library
OL25051782M
ISBN 13
9781611225013
LCCN
2010038653

Work Identifiers

Work ID
OL16173747W

Source records

Library of Congress MARC record
Better World Books record
Library of Congress MARC record

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History

Download catalog record: RDF / JSON
November 13, 2020 Edited by MARC Bot import existing book
October 23, 2011 Created by LC Bot import new book