An edition of Micromachining and microfabrication process technology IV (1998)

Micromachining and microfabrication process technology IV

21-22 September, 1998, Santa Clara, California

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Micromachining and microfabrication process t ...
James H. Smith, chair/editor ; ...
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Last edited by ImportBot
August 4, 2020 | History
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An edition of Micromachining and microfabrication process technology IV (1998)

Micromachining and microfabrication process technology IV

21-22 September, 1998, Santa Clara, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
402

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Subjects
Micromachining, Microfabrication, Congresses, Electromechanical devices, Design and construction, Micromechanics

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Edition Availability
Cover of: Micromachining and microfabrication process technology IV
Micromachining and microfabrication process technology IV: 21-22 September, 1998, Santa Clara, California
1998, SPIE
in English
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Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 3511, Proceedings of SPIE--the International Society of Optical Engineering ;, v. 3511.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TJ1191.5 .M5523 1998, TJ1191.5.M5523 1998

The Physical Object

Pagination
xi, 402 p. :
Number of pages
402

ID Numbers

Open Library
OL90732M
ISBN 10
0819429708
LCCN
99200342
OCLC/WorldCat
39930212
Goodreads
4351586

Source records

Scriblio MARC record
Library of Congress MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record

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History

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August 4, 2020 Edited by ImportBot import existing book
February 4, 2019 Created by MARC Bot import existing book