In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing

19-21 May, 1999, Edinburgh, Scotland

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Last edited by ImportBot
October 8, 2020 | History

In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing

19-21 May, 1999, Edinburgh, Scotland

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Publish Date
Publisher
SPIE
Language
English
Pages
344

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Previews available in: English

Book Details


Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Wash., USA
Series
Proceedings EurOpt series, Proceedings / SPIE--the International Society for Optical Engineering ;, v. 3743, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3743.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7874 .I4633 1999, TK7874.I4633 1999

The Physical Object

Pagination
viii, 344 p. :
Number of pages
344

Edition Identifiers

Open Library
OL6804020M
Internet Archive
inlinecharacteri3743unse
ISBN 10
0819432237
LCCN
00266407
OCLC/WorldCat
41549721
Goodreads
3143189

Work Identifiers

Work ID
OL18252271W

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History

Download catalog record: RDF / JSON
October 8, 2020 Edited by ImportBot import existing book
February 4, 2019 Created by MARC Bot import existing book