An edition of Handbook of VLSI microlithography (2000)

Handbook of VLSI microlithography

principles, technology, and applications

2nd ed.

by

Cover of: Handbook of VLSI microlithography by John N. Helbert
Not in Library

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Last edited by MARC Bot
December 20, 2022 | History
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An edition of Handbook of VLSI microlithography (2000)

Handbook of VLSI microlithography

principles, technology, and applications

2nd ed.

by

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Publish Date
Publisher
Noyes Publications/William Andrew Pub.
Language
English

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Previews available in: English

Subjects

Very large scale integration, Microlithography, Integrated circuits, Integrated circuits, very large scale integration, Circuits intégrés à très grande échelle, Microlithographie, TECHNOLOGY & ENGINEERING, Electronics, Circuits, General

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Edition Availability
Cover of: Handbook of VLSI microlithography
Handbook of VLSI microlithography: principles, technology, and applications
2000, Noyes Publications/William Andrew Pub.
in English - 2nd ed.
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Norwich, NY

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .H3494 2001, TK7874.H3494 2001, TK7874 .H3494 2001eb

The Physical Object

Pagination
p. cm.

ID Numbers

Open Library
OL6781112M
Internet Archive
handbookvlsimicr00helb_411
ISBN 10
0815514441
LCCN
00028173
OCLC/WorldCat
49708527

Source records

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History

Download catalog record: RDF / JSON
December 20, 2022 Edited by MARC Bot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 4, 2019 Created by MARC Bot import existing book