An edition of Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI (1996)

Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI

11-13 March 1996, Santa Clara, California

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Cover of: Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI by David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.
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Last edited by ImportBot
July 31, 2020 | History
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An edition of Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI (1996)

Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI

11-13 March 1996, Santa Clara, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
412

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Subjects
Electron beam Lithography, Congresses, Integrated circuits, Ion beam lithography, X-ray lithography, Masks, Extreme ultraviolet lithography, Masks (electronics), Lithography, electron beam

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Edition Availability
Cover of: Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI: 11-13 March 1996, Santa Clara, California
1996, SPIE
in English
  • Not in Library
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Book Details

Edition Notes

Includes bibliographic references and index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 2723, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2723.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .E48352 1996, TK7874.E48352 1996

The Physical Object

Pagination
vii, 412 p. :
Number of pages
412

ID Numbers

Open Library
OL820467M
ISBN 10
0819420999
LCCN
95072312
OCLC/WorldCat
35192949
Goodreads
4681575

Source records

Scriblio MARC record
Library of Congress MARC record
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July 31, 2020 Edited by ImportBot import existing book
February 11, 2019 Edited by MARC Bot import existing book
February 5, 2019 Created by MARC Bot import existing book