An edition of Extreme ultraviolet lithography (2009)

Extreme ultraviolet lithography

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Cover of: Extreme ultraviolet lithography by Banqiu Wu
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Last edited by ImportBot
March 16, 2023 | History
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An edition of Extreme ultraviolet lithography (2009)

Extreme ultraviolet lithography

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Publish Date
Publisher
McGraw-Hill, McGraw-Hill Education, McGraw Hill
Language
English
Pages
482

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Subjects

Masks, Extreme ultraviolet lithography, Integrated circuits, Design and construction, Lithography
Edition Availability
Cover of: Extreme Ultraviolet Lithography
Extreme Ultraviolet Lithography
2009, Wiley & Sons, Incorporated, John
in English
Cover of: Extreme ultraviolet lithography
Extreme ultraviolet lithography
2009, McGraw-Hill, McGraw-Hill Education, McGraw Hill
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
New York

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7872.M3 E987 2009, TK7872.M3E987 2009

The Physical Object

Pagination
p. cm.
Number of pages
482

ID Numbers

Open Library
OL23016582M
ISBN 10
0071549188
ISBN 13
9780071549189
LCCN
2009002187
OCLC/WorldCat
244060505
Goodreads
5676444

Source records

Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record
amazon.com record

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History

Download catalog record: RDF / JSON
March 16, 2023 Edited by ImportBot import existing book
August 2, 2020 Edited by ImportBot import existing book
February 12, 2019 Created by MARC Bot import existing book