An edition of Process module metrology, control, and clustering, 11-13 September 1991, San Jose, Calif (1991)

Process module metrology, control, and clustering

11-13 September 1991, San Jose, California

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Cover of: Process module metrology, control, and clustering by Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
April 2, 2019 | History
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An edition of Process module metrology, control, and clustering, 11-13 September 1991, San Jose, Calif (1991)

Process module metrology, control, and clustering

11-13 September 1991, San Jose, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
419

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Previews available in: English

Subjects
Real-time control, Design and construction, Congresses, Integrated circuits, Process control, Microelectronics industry, Industrial applications, Manufacturing processes, Optical detectors, Automation, Production control
Edition Availability
Cover of: Process module metrology, control, and clustering
Process module metrology, control, and clustering: 11-13 September 1991, San Jose, California
1992, SPIE
in English
Libraries near you: WorldCat
Cover of: Process module metrology, control, and clustering, 11-13 September 1991, San Jose, Calif.
Process module metrology, control, and clustering, 11-13 September 1991, San Jose, Calif.
1991, SPIE--International Society for Optical Engineering
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1594, Proceedings of SPIE--the International Society for OPtical Engineering ;, v. 1594.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7836 .P74 1992

The Physical Object

Pagination
ix, 419 p. :
Number of pages
419

ID Numbers

Open Library
OL1572305M
Internet Archive
isbn_0819407259_1594
ISBN 10
0819407259
LCCN
91067547
OCLC/WorldCat
25381898
Goodreads
4214138

Source records

University of Toronto MARC record
Scriblio MARC record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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April 2, 2019 Edited by MARC Bot import existing book
February 17, 2019 Created by MARC Bot import existing book