An edition of Emerging lithographic technologies X (2006)

Emerging lithographic technologies X

21-23 February, 2006, San Jose, California, USA

Michael J. Lercel, chair/edito ...

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August 2, 2020 | History

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An edition of Emerging lithographic technologies X (2006)

Emerging lithographic technologies X

21-23 February, 2006, San Jose, California, USA

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Publish Date

2006

Publisher

SPIE

Language

English

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1 Emerging lithographic technologies X: 21-23 February, 2006, San Jose, California, USA 2006, SPIE in English 0819461946 9780819461940	aaaa Not in Library Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in: Bellingham, Wash
Series: Proceedings of SPIE -- v. 6151, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6151.
Genre: Congresses.

Classifications

Library of Congress: TK7874 .E527 2006, TK7874.E527 2006

The Physical Object

Pagination: 2 v. :

ID Numbers

Open Library: OL16293028M
ISBN 10: 0819461946
ISBN 13: 9780819461940
LCCN: 2007533259

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Created February 19, 2019
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August 2, 2020	Edited by ImportBot	import existing book
February 19, 2019	Created by MARC Bot	import existing book

Emerging lithographic technologies X

21-23 February, 2006, San Jose, California, USA