An edition of Micromachining and microfabrication process technology VIII (2003)

Micromachining and microfabrication process technology VIII

27-29 January, 2003, San Jose, California, USA

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Cover of: Micromachining and microfabrication process technology VIII by John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
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Last edited by MARC Bot
March 11, 2019 | History
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An edition of Micromachining and microfabrication process technology VIII (2003)

Micromachining and microfabrication process technology VIII

27-29 January, 2003, San Jose, California, USA

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
604

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Subjects
Micromachining, Microfabrication, Congresses, Electromechanical devices, Design and construction

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Edition Availability
Cover of: Micromachining and microfabrication process technology VIII
Micromachining and microfabrication process technology VIII: 27-29 January, 2003, San Jose, California, USA
2003, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 4979, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4979.
Genre
Congresses.

Classifications

Dewey Decimal Class
671.3/5
Library of Congress
TJ1191.5 .M5524322 2003, TJ1191.5.M5524322

The Physical Object

Pagination
ix, 604 p. :
Number of pages
604

ID Numbers

Open Library
OL3323972M
ISBN 10
081944779X
LCCN
2004296874
OCLC/WorldCat
52054641
Goodreads
3829509

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record

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History

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March 11, 2019 Created by MARC Bot import existing book