An edition of Electron-beam, x-ray, and ion-beam lithographies VI (1987)

Electron-beam, x-ray, and ion-beam lithographies VI

[proceedings] 5-6 March 1987, Santa Clara, California

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Cover of: Electron-beam, x-ray, and ion-beam lithographies VI by Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
July 21, 2024 | History
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An edition of Electron-beam, x-ray, and ion-beam lithographies VI (1987)

Electron-beam, x-ray, and ion-beam lithographies VI

[proceedings] 5-6 March 1987, Santa Clara, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
The Society
Language
English
Pages
265

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Subjects
Electron beam Lithography, Congresses, Ion beam lithography, X-ray lithography, Microlithography

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Edition Availability
Cover of: Electron-beam, x-ray, and ion-beam lithographies VI
Electron-beam, x-ray, and ion-beam lithographies VI: [proceedings] 5-6 March 1987, Santa Clara, California
1987, The Society
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering ;, v. 773

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7874 .E4817 1987

The Physical Object

Pagination
vi, 265 p. :
Number of pages
265

ID Numbers

Open Library
OL2410840M
ISBN 10
0892528087
LCCN
87060741
OCLC/WorldCat
506773759
Goodreads
4360418

Source records

Scriblio MARC record
Library of Congress MARC record
Promise Item
marc_columbia MARC record

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July 21, 2024 Edited by MARC Bot import existing book
April 2, 2019 Created by MARC Bot import existing book