Gas-phase and surface chemistry in electronic materials processing

symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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Last edited by MARC Bot
July 25, 2024 | History

Gas-phase and surface chemistry in electronic materials processing

symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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Publish Date
Language
English
Pages
556

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Book Details


Edition Notes

Includes bibliographical references and indexes.

Published in
Pittsburgh, Pa
Series
Materials Research Society symposium proceedings ;, v. 334, Materials Research Society symposia proceedings ;, v. 334.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871 .G37 1994

The Physical Object

Pagination
xv, 556 p. :
Number of pages
556

ID Numbers

Open Library
OL1085739M
ISBN 10
1558992332
LCCN
94009632
OCLC/WorldCat
502451323
Goodreads
4930058

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History

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July 25, 2024 Edited by MARC Bot import existing book
July 31, 2020 Edited by ImportBot import existing book
July 31, 2019 Edited by MARC Bot associate edition with work OL19483121W
April 3, 2019 Created by MARC Bot import existing book