An edition of Monitoring and control of plasma-enhanced processing of semiconductors (1989)

Monitoring and control of plasma-enhanced processing of semiconductors

proceedings : 1-2 November 1988, Santa Clara, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read
Cover of: Monitoring and control of plasma-enhanced processing of semiconductors by James E. Griffiths, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Preview Only
Borrow Listen

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read
Notes

Check nearby libraries

Buy this book

Last edited by ImportBot
July 28, 2023 | History
Edit
An edition of Monitoring and control of plasma-enhanced processing of semiconductors (1989)

Monitoring and control of plasma-enhanced processing of semiconductors

proceedings : 1-2 November 1988, Santa Clara, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English
Pages
147

Check nearby libraries

Buy this book

Previews available in: English

Subjects
Plasma engineering, Semiconductors, Congresses, Vapor plating, Epitaxy
Edition Availability
Cover of: Monitoring and control of plasma-enhanced processing of semiconductors
Monitoring and control of plasma-enhanced processing of semiconductors: proceedings : 1-2 November 1988, Santa Clara, California
1989, SPIE
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographical references.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 1037, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1037.

Classifications

Dewey Decimal Class
621.381/52
Library of Congress
TK7871.85 .M577 1989

The Physical Object

Pagination
viii, 147 p. :
Number of pages
147

ID Numbers

Open Library
OL2066313M
Internet Archive
isbn_0819400726_1037
ISBN 10
0819400726
LCCN
88063652
Goodreads
5714168

Source records

Scriblio MARC record
Library of Congress MARC record
Internet Archive item record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
July 28, 2023 Edited by ImportBot import existing book
April 3, 2019 Created by MARC Bot import existing book