An edition of Advanced short-time thermal processing for Si-based CMOS devices II (2004)

Advanced short-time thermal processing for Si-based CMOS devices II

proceedings of the international symposium

by

Cover of: Advanced short-time thermal processing for Si-based CMOS devices II by Fred Roozeboom
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Last edited by MARC Bot
April 3, 2019 | History
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An edition of Advanced short-time thermal processing for Si-based CMOS devices II (2004)

Advanced short-time thermal processing for Si-based CMOS devices II

proceedings of the international symposium

by

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Publish Date
Publisher
Electrochemical Society
Language
English
Pages
428

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Subjects

Heat treatment, Semiconductors, Rapid thermal processing
Edition Availability
Cover of: Advanced short-time thermal processing for Si-based CMOS devices II
Advanced short-time thermal processing for Si-based CMOS devices II: proceedings of the international symposium
2004, Electrochemical Society
in English

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Book Details

Edition Notes

Includes bibliographical references and indexes.
"Electronics, Dielectric Science and Technology, High Temperature Materials" divisions.

Published in
Pennington, NJ
Series
Proceedings ;, v. PV 2004-01, Proceedings (Electrochemical Society) ;, v. 2004-01.
Other Titles
Advanced short-time thermal processing for Si-based CMOS devices 2, Advanced short-time thermal processing for Si-based CMOS devices two

Classifications

Library of Congress
TK7871.85 A3535 2004

The Physical Object

Pagination
xii, 428 p. :
Number of pages
428

ID Numbers

Open Library
OL3313727M
ISBN 10
1566774063
LCCN
2004102296
OCLC/WorldCat
55893627

Source records

Scriblio MARC record
Library of Congress MARC record

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