An edition of Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II (1992)

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II

8-9 March 1992, San Jose, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read
Cover of: Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II by Martin Peckerar, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Preview Only
Borrow Listen

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
April 9, 2019 | History
Edit
An edition of Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II (1992)

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II

8-9 March 1992, San Jose, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE
Language
English
Pages
488

Check nearby libraries

Buy this book

Previews available in: English

Subjects
Electron beam Lithography, Congresses, Etching, Ion beam lithography, X-ray lithography, Semiconductors, Masks (Electronics)

Showing 1 featured edition. View all 1 editions?

Edition Availability
Cover of: Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II
Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing II: 8-9 March 1992, San Jose, California
1992, SPIE
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1671, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1671.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7874 .E4834 1992

The Physical Object

Pagination
x, 488 p. :
Number of pages
488

ID Numbers

Open Library
OL1746392M
Internet Archive
isbn_0819408263_1671
ISBN 10
0819408263
LCCN
92060181
Goodreads
7131163

Source records

Scriblio MARC record
Library of Congress MARC record
Internet Archive item record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
April 9, 2019 Created by MARC Bot import existing book