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This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
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Previews available in: English
Edition | Availability |
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1
Electron Beam Testing Technology
1993, Springer US, Imprint, Springer
electronic resource /
in English
1489915222 9781489915221
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Book Details
Table of Contents
Background to Electron Beam Testing Technology
I
1. Introduction
2. Principles and Applications
II
3. Essential Electron Optics
4. Electron Beam Interaction with Specimen
5. Electron Spectrometers and Voltage Measurements
6. High-Speed Techniques
7. Picosecond Photoemission Probing
8. Signal and Image Processing
III
9. System Integration
10. Practical Considerations in Electron Beam Testing
11. Industrial Case Studies.
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Feedback?October 5, 2021 | Edited by ImportBot | import existing book |
June 30, 2019 | Created by MARC Bot | import new book |