An edition of Electron Beam Testing Technology (1993)

Electron Beam Testing Technology

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Last edited by ImportBot
October 5, 2021 | History
An edition of Electron Beam Testing Technology (1993)

Electron Beam Testing Technology

This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.

Publish Date
Language
English
Pages
462

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Previews available in: English

Edition Availability
Cover of: Electron Beam Testing Technology
Electron Beam Testing Technology
1993, Springer US, Imprint, Springer
electronic resource / in English

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Book Details


Table of Contents

Background to Electron Beam Testing Technology
I
1. Introduction
2. Principles and Applications
II
3. Essential Electron Optics
4. Electron Beam Interaction with Specimen
5. Electron Spectrometers and Voltage Measurements
6. High-Speed Techniques
7. Picosecond Photoemission Probing
8. Signal and Image Processing
III
9. System Integration
10. Practical Considerations in Electron Beam Testing
11. Industrial Case Studies.

Edition Notes

Published in
Boston, MA
Series
Microdevices, Physics and Fabrication Technologies, Microdevices, Physics and Fabrication Technologies

Classifications

Dewey Decimal Class
530.41
Library of Congress
QC176-176.9, QC1-75, QC173.45-173.458

The Physical Object

Format
[electronic resource] /
Pagination
1 online resource (XVI, 462 pages).
Number of pages
462

ID Numbers

Open Library
OL27034985M
Internet Archive
electronbeamtest00nixo
ISBN 10
1489915222, 1489915249
ISBN 13
9781489915221, 9781489915245
OCLC/WorldCat
859587135

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October 5, 2021 Edited by ImportBot import existing book
June 30, 2019 Created by MARC Bot import new book