An edition of The physics of micro/nano-fabrication
(1992)
The physics of micro/nano-fabrication
by Ivor Brodie
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
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Previews available in: English
| Edition | Availability |
|---|---|
1
The physics of micro/nano-fabrication
1992, Springer
electronic resource /
in English
1475767757 9781475767759
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Book Details
Table of Contents
1. Preliminary Survey
2. Particle Beams: Sources, Optics, and Interactions
3. Plasmas: Physics and Chemistry
4. Layering Technologies
5. Pattern Generation
6. Microcharacterization
7. Limits to Nanofabrication
Appendixes
Author Index.
Edition Notes
Includes bibliographical references and indexes.
Classifications
The Physical Object
Edition Identifiers
Work Identifiers
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| September 28, 2024 | Edited by MARC Bot | import existing book |
| October 4, 2021 | Edited by ImportBot | import existing book |
| July 6, 2019 | Created by MARC Bot | import new book |