Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18)

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July 31, 2020 | History

Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18)

1st edition
  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Academic Press
Language
English
Pages
328

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Edition Availability
Cover of: Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18)
Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18)
January 15, 1994, Academic Press
Hardcover in English - 1st edition

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Book Details


Classifications

Library of Congress

The Physical Object

Format
Hardcover
Number of pages
328
Dimensions
9.2 x 6.2 x 1.1 inches
Weight
1.6 pounds

ID Numbers

Open Library
OL9812286M
ISBN 10
0125330189
ISBN 13
9780125330183
Goodreads
1683554

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July 31, 2020 Created by ImportBot import existing book