An edition of Design, Test, and Microfabrication of MEMS and MOEMS
(1999)
Design, Test, and Microfabrication of Mems and Moems
30 March-1 April 1999, Paris, France (Proceedings of Spie--the International Society for Optical Engineering, V. 3680.)
2-Volume Set edition
by SPIE, Selden B. Crary, Wolfgang Ehrfeld, and Hiroyuki Fujita
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Last edited by Tom Morris
January 17, 2023 | History
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Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France (Proceedings of Spie--the International Society for Optical Engineering, V. 3680.)
March 1999, SPIE-International Society for Optical Engine, SPIE
Paperback
in English
- 2-Volume Set edition
0819431540 9780819431547
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| January 17, 2023 | Edited by Tom Morris | merge authors |
| September 13, 2020 | Edited by MARC Bot | import existing book |
| July 31, 2020 | Created by ImportBot | import existing book |