An edition of Surface Scattering and Diffraction (2003)

Surface scattering and diffraction III

4-6 August, 2003, San Diego, California, USA

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Last edited by MARC Bot
December 8, 2020 | History
An edition of Surface Scattering and Diffraction (2003)

Surface scattering and diffraction III

4-6 August, 2003, San Diego, California, USA

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Publish Date
Publisher
SPIE
Language
English
Pages
198

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and author index.
Previous symposia entitled: Surface scattering and diffraction for advanced metrology.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 5189, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5189.
Genre
Congresses.
Other Titles
Surface scattering and diffraction for advanced metrology

Classifications

Dewey Decimal Class
681/.25
Library of Congress
TA418.7 .S9276 2003, TA418.7.S9276 2003

The Physical Object

Pagination
vii, 198 p. :
Number of pages
198

ID Numbers

Open Library
OL3325272M
ISBN 10
0819450626
LCCN
2004298704
OCLC/WorldCat
53333768
Goodreads
3443831

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History

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December 8, 2020 Edited by MARC Bot import existing book
August 1, 2020 Created by ImportBot import existing book