An edition of Angular sensitivity of controlled implanted doping profiles (1978)

Angular sensitivity of controlled implanted doping profiles

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Angular sensitivity of controlled implanted d ...
Robert G. Wilson ... [et al.].
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October 15, 2020 | History
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An edition of Angular sensitivity of controlled implanted doping profiles (1978)

Angular sensitivity of controlled implanted doping profiles

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Publish Date
Publisher
U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
Language
English
Pages
54

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Subjects
Semiconductor doping, Ion implantation, Integrated circuits

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Edition Availability
Cover of: Angular sensitivity of controlled implanted doping profiles
Angular sensitivity of controlled implanted doping profiles
1978, U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
in English
  • Not in Library
Cover of: Angular sensitivity of controlled implanted doping profiles
Angular sensitivity of controlled implanted doping profiles
1978, Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references.

Published in
[Washington]
Series
Semiconductor measurement technology, NBS special publication ; 400-49, NBS special publication ;, 400-49.

Classifications

Dewey Decimal Class
602/.1 s, 621.3815/2/028
Library of Congress
QC100 .U57 no. 400-49, TK7871.85 .U57 no. 400-49

The Physical Object

Pagination
vii, 54 p. :
Number of pages
54

ID Numbers

Open Library
OL4723120M
LCCN
78010624

Source records

Library of Congress MARC record

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