An edition of Micron and submicron integrated circuit metrology (1985)

Micron and submicron integrated circuit metrology

August 22-23, 1985, San Diego, California

by

Cover of: Micron and submicron integrated circuit metrology by Kevin M. Monahan
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Last edited by MARC Bot
November 2, 2020 | History
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An edition of Micron and submicron integrated circuit metrology (1985)

Micron and submicron integrated circuit metrology

August 22-23, 1985, San Diego, California

by

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Publish Date
Publisher
SPIE--International Society for Optical Engineering
Language
English
Pages
223

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Subjects

Testing, Congresses, Integrated circuits, Measurement
Edition Availability
Cover of: Micron and submicron integrated circuit metrology
Micron and submicron integrated circuit metrology: August 22-23, 1985, San Diego, California
1985, SPIE--International Society for Optical Engineering
in English

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Book Details

Edition Notes

Includes bibliographies.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering ;, v. 565

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .M488 1985

The Physical Object

Pagination
vi, 223 p. :
Number of pages
223

ID Numbers

Open Library
OL2556224M
ISBN 10
0892526009
LCCN
85062883
OCLC/WorldCat
13243583

Source records

Library of Congress MARC record
marc_columbia MARC record

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November 2, 2020 Created by MARC Bot import existing book