An edition of Epitaxial silicon technology (1986)

Epitaxial silicon technology

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Cover of: Epitaxial silicon technology by B. Jayant Baliga
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Last edited by MARC Bot
November 4, 2020 | History
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An edition of Epitaxial silicon technology (1986)

Epitaxial silicon technology

by

  • 1 Want to read

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Publish Date
Publisher
Academic Press
Language
English
Pages
328

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Subjects

Growth, Epitaxy, Silicon crystals, Semiconductors, Silicon-on-insulator technology, Design and construction
Edition Availability
Cover of: Epitaxial silicon technology
Epitaxial silicon technology
1986, Academic Press
in English

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Book Details

Table of Contents

Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose
Silicon molecular beam epitaxy / Subramanian S. Iyer
Silicon liquid phase epitaxy / B. Jayant Baliga
Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev
Silicon-on-insulator epitaxy / Hon Wai Lam.

Edition Notes

Includes bibliographies and index.

Published in
Orlando

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .E65 1986

The Physical Object

Pagination
viii, 328 p. :
Number of pages
328

Edition Identifiers

Open Library
OL2710802M
ISBN 10
0120771209
LCCN
86003524
OCLC/WorldCat
13426011
Goodreads
3768728

Work Identifiers

Work ID
OL22927763W

Source records

Library of Congress MARC record
marc_columbia MARC record

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