Rapid thermal processing of semiconductors

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Last edited by Open Library Bot
April 28, 2010 | History

Rapid thermal processing of semiconductors

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Publish Date
Publisher
Plenum Press
Language
English
Pages
358

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Previews available in: English

Edition Availability
Cover of: Rapid thermal processing of semiconductors
Rapid thermal processing of semiconductors
1997, Plenum Press
in English

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Book Details


Edition Notes

Includes bibliographical references (p. 301-353) and index.

Published in
New York
Series
Microdevices, The language of science

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .B64 1997, TA401-492

The Physical Object

Pagination
xxii, 358 p. :
Number of pages
358

ID Numbers

Open Library
OL658573M
Internet Archive
rapidthermalproc0000bori
ISBN 10
0306450542
LCCN
97003783
Goodreads
3950544

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History

Download catalog record: RDF / JSON
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
February 5, 2010 Edited by WorkBot add more information to works
December 10, 2009 Created by WorkBot add works page