An edition of Single chamber processing: proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992 (1993)

Single chamber processing

proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992

by

Cover of: Single chamber processing by European Materials Research Society. Meeting, European Materials Research Society. Meeting
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Last edited by Open Library Bot
April 28, 2010 | History
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An edition of Single chamber processing: proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992 (1993)

Single chamber processing

proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992

by

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Publish Date
Publisher
North-Holland
Language
English
Pages
162

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Subjects

Congresses, Vacuum technology, Semiconductors, Design and construction
Edition Availability
Cover of: Single chamber processing
Single chamber processing: proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992
1993, North-Holland
in English

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Book Details

Edition Notes

Includes bibliographical references.

Published in
Amsterdam, New York
Series
European Materials Research Society symposia proceedings ;, v. 37

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7871.85 .E87 1992

The Physical Object

Pagination
x, 162 p. :
Number of pages
162

ID Numbers

Open Library
OL1737421M
ISBN 10
0444899154
LCCN
92042556
OCLC/WorldCat
27267723
Goodreads
4632673

Source records

Library of Congress MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
March 17, 2010 Edited by WorkBot update details
December 10, 2009 Created by WorkBot add works page