An edition of Excimer laser lithography (1990)

Excimer laser lithography

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Cover of: Excimer laser lithography by Kanti Jain
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Last edited by ImportBot
February 25, 2022 | History
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An edition of Excimer laser lithography (1990)

Excimer laser lithography

by

  • 0 Ratings
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  • 1 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE Optical Engineering Press
Language
English
Pages
212

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Subjects
Excimer lasers, Industrial applications, Microlithography, Lasers, industrial applications

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Edition Availability
Cover of: Excimer laser lithography
Excimer laser lithography
1990, SPIE Optical Engineering Press
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references (p. 193-207).

Published in
Bellingham, Wash., USA

Classifications

Dewey Decimal Class
621.381/531
Library of Congress
TA1695 .J35 1990, TA1695.J35 1990

The Physical Object

Pagination
x, 212 p. :
Number of pages
212

ID Numbers

Open Library
OL2202506M
ISBN 10
0819402710, 0819402729
LCCN
89024240

Source records

Library of Congress MARC record
Better World Books record
Promise Item

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History

Download catalog record: RDF / JSON
February 25, 2022 Edited by ImportBot import existing book
June 12, 2020 Edited by Michel T. Talbot Added new cover
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page