High vacuum production in the microelectronics industry

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Last edited by Open Library Bot
December 4, 2010 | History

High vacuum production in the microelectronics industry

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Publish Date
Publisher
Elsevier
Language
English
Pages
222

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Book Details


Edition Notes

Bibliography: p. 163-167.
"ALCATEL."
Includes index.

Published in
Amsterdam, New York
Series
Plasma technology ;, 2

Classifications

Dewey Decimal Class
671.7/35
Library of Congress
TS695 .D88 1988

The Physical Object

Pagination
xiii, 222 p. :
Number of pages
222

ID Numbers

Open Library
OL2243735M
ISBN 10
044442878X
LCCN
89116745
Goodreads
481038

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History

Download catalog record: RDF / JSON
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page