An edition of Atomic layer deposition for nanotechnology (2008)

Atomic layer deposition for nanotechnology

an enabling process for nanotechnology fabrication

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Atomic layer deposition for nanotechnology
Arthur Sherman
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Last edited by MARC Bot
December 22, 2020 | History
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An edition of Atomic layer deposition for nanotechnology (2008)

Atomic layer deposition for nanotechnology

an enabling process for nanotechnology fabrication

by

  • 0 Ratings
  • 1 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Ivoryton Press
Language
English
Pages
239

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Subjects
Chemical vapor deposition, Epitaxy, Microelectronics, Nanotechnology, Atomic layer deposition

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Edition Availability
Cover of: Atomic layer deposition for nanotechnology
Atomic layer deposition for nanotechnology: an enabling process for nanotechnology fabrication
2008, Ivoryton Press
in English
  • Not in Library
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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Ivoryton, Conn

Classifications

Library of Congress
TS695 .S5385 2008

The Physical Object

Pagination
xv, 239 p. :
Number of pages
239

ID Numbers

Open Library
OL17020717M
ISBN 13
9780981466347
LCCN
2008900091
OCLC/WorldCat
236117849

Source records

Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record

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History

Download catalog record: RDF / JSON
December 22, 2020 Edited by MARC Bot import existing book
December 3, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page