An edition of Notes on SEM examination of microelectronic devices (1977)

Notes on SEM examination of microelectronic devices

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Notes on SEM examination of microelectronic d ...
John R. Devaney, John R. Devan ...
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Notes
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Last edited by MARC Bot
November 15, 2023 | History
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An edition of Notes on SEM examination of microelectronic devices (1977)

Notes on SEM examination of microelectronic devices

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Publish Date
Publisher
U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
Language
English
Pages
48

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Subjects

Miniature electronic equipment, Scanning electron microscopy, Semiconductors, Testing, Scanning electron microscopes, Technique
Edition Availability
Cover of: Notes on SEM examination of microelectronic devices
Notes on SEM examination of microelectronic devices
1977, U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
in English

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Book Details

Edition Notes

Includes bibliographical references.

Published in
Washington
Series
Semiconductor measurement technology, NBS special publication ; 400-35, NBS special publication ;, 400-35.

Classifications

Dewey Decimal Class
602/.1 s, 621.381/71/028
Library of Congress
QC100 .U57 no. 400-35, TK7874 .U57 no. 400-35

The Physical Object

Pagination
iv, 48 p. :
Number of pages
48

ID Numbers

Open Library
OL4693385M
LCCN
77608011
OCLC/WorldCat
2796302

Source records

Library of Congress MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
November 15, 2023 Edited by MARC Bot import existing book
December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page