An edition of Photomask and next-generation lithography mask technology IX (2002)

Photomask and next-generation lithography mask technology IX

23-25 April, 2002, Yokohama, Japan

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Cover of: Photomask and next-generation lithography mask technology IX by Photomask Japan 2002 (2002 Yokohama, Japan)
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Last edited by ImportBot
August 1, 2020 | History
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An edition of Photomask and next-generation lithography mask technology IX (2002)

Photomask and next-generation lithography mask technology IX

23-25 April, 2002, Yokohama, Japan

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
918

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Previews available in: English

Subjects
Congresses, Design and construction, Integrated circuits, Masks, Masks (Electronics), Microlithography, Optoelectronic devices, X-ray lithography, Masks (electronics)

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Edition Availability
Cover of: Photomask and next-generation lithography mask technology IX
Photomask and next-generation lithography mask technology IX: 23-25 April, 2002, Yokohama, Japan
2002, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.
Some earlier proceedings have title: Photomask and X-ray mask technology.

Published in
Bellingham, Wash
Series
SPIE proceedings series ;, v. 4754, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4754.
Genre
Congresses.
Other Titles
Photomask and X-ray mask technology

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7878 .P565 2002,

The Physical Object

Pagination
xxx, 918 p. :
Number of pages
918

ID Numbers

Open Library
OL3320498M
Internet Archive
photomasknextgen4754phot
ISBN 10
0819445177
LCCN
2004272510
OCLC/WorldCat
50613555
Goodreads
3598747

Source records

Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
August 1, 2020 Edited by ImportBot import existing book
December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page