Advances in resist technology and processing XII

20-22 February 1995, Santa Clara, California

Advances in resist technology and processing ...
Robert D. Allen
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Last edited by ImportBot
August 1, 2020 | History

Advances in resist technology and processing XII

20-22 February 1995, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
904

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Edition Availability
Cover of: Advances in Resist Technology and Processing XII
Advances in Resist Technology and Processing XII
February 1995, Society of Photo Optical
Hardcover in English
Cover of: Advances in resist technology and processing XII

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Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering -- v. 2438., Proceedings of SPIE--the International Society for Optical Engineering -- v. 2438.
Genre
Congresses.

The Physical Object

Pagination
xiii, 904 p. :
Number of pages
904

ID Numbers

Open Library
OL19567790M
ISBN 10
0819417866
ISBN 13
9780819417862
LCCN
94069901
OCLC/WorldCat
32808965

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON
August 1, 2020 Edited by ImportBot import existing book
February 7, 2019 Edited by MARC Bot import existing book
December 10, 2009 Created by WorkBot add works page