An edition of Chemical mechanical planarization VI (2003)

Chemical mechanical planarization VI

proceedings of the international symposium

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Cover of: Chemical mechanical planarization VI by International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing (6th 2003 Orlando, Fla.)
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Last edited by MARC Bot
December 8, 2020 | History
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An edition of Chemical mechanical planarization VI (2003)

Chemical mechanical planarization VI

proceedings of the international symposium

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Electrochemical Society
Language
English
Pages
358

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Subjects
Congresses, Grinding and polishing, Integrated circuits, Materials, Metals, Microelectronics, Pickling, Chemical mechanical planarization

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Edition Availability
Cover of: Chemical mechanical planarization VI
Chemical mechanical planarization VI: proceedings of the international symposium
2003, Electrochemical Society
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and indexes.
"... proceedings of the 6th International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit Device Manufacturing held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003"--Pref.
"Sponsoring division, Electronics."

Published in
Pennington, NJ
Series
Proceedings ;, v. 2003-21, Proceedings (Electrochemical Society) ;, v. 2003-21.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7871 .I586 2003

The Physical Object

Pagination
vii, 358 p. :
Number of pages
358

ID Numbers

Open Library
OL3699495M
ISBN 10
1566774047
LCCN
2003116456
Goodreads
3559600

Source records

Library of Congress MARC record

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History

Download catalog record: RDF / JSON
December 8, 2020 Edited by MARC Bot import existing book
December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page