An edition of 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 (1999)

15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98

16-17 November 1998, Munich-Unterhaching, Germany

by

Cover of: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 by European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th 1998 Munich-Unterhaching, Germany), European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th 1998 Munich-Unterhaching, Germany)
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Last edited by ImportBot
July 31, 2020 | History
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An edition of 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 (1999)

15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98

16-17 November 1998, Munich-Unterhaching, Germany

by

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Publish Date
Publisher
SPIE
Language
English
Pages
180

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Previews available in: English

Subjects

Congresses, Integrated circuits, Masks, Microlithography, X-ray lithography, Microcomputers

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Edition Availability
Cover of: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98: 16-17 November 1998, Munich-Unterhaching, Germany
1999, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 3665, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3665.
Genre
Congresses.
Other Titles
Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents, European Conference on Mask Technology for Integrated Circuits and Microcomponents, Mask technology for integrated circuits and microcomponents

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7872.M3 E97 1998, TK7872.M3E97 1998

The Physical Object

Pagination
ix, 180 p. :
Number of pages
180

ID Numbers

Open Library
OL6805217M
Internet Archive
15theuropeanconf3665euro
ISBN 10
0819431397
LCCN
00268121
OCLC/WorldCat
41488035
Goodreads
3893708

Source records

Scriblio MARC record
Library of Congress MARC record
Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
July 31, 2020 Edited by ImportBot import existing book
December 6, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page