An edition of Integrated Circuit Metrology, Inspection, and Process Control III
(1989)
Integrated circuit metrology, inspection, and process control III
27-28 February 1989, Los Angeles, California
by Kevin M. Monahan
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Subjects
Inspection, Congresses, Integrated circuits, Measurement| Edition | Availability |
|---|---|
1
Integrated circuit metrology, inspection, and process control III: 27-28 February 1989, Los Angeles, California
1989, SPIE
in English
0819401226 9780819401229
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2
Integrated Circuit Metrology, Inspection, and Process Control III: 27-28 February 1989, Los Angeles, California (Spie Proceedings, Vol 1087)
July 1989, Society of Photo Optical
Paperback
in English
0819401226 9780819401229
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Book Details
Edition Notes
Includes bibliographical references.
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| February 17, 2019 | Edited by MARC Bot | import existing book |
| April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
| December 11, 2009 | Created by WorkBot | add works page |