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Edition | Availability |
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1
Integrated Circuit Metrology, Inspection, and Process Control
July 1987, Society of Photo Optical
Paperback
0892528109 9780892528103
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2
Integrated circuit metrology, inspection, and process control: [papers]
1987, SPIE--the International Society for Optical Engineering
in English
0892528109 9780892528103
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Book Details
Edition Notes
Includes bibliographies and index.
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July 20, 2024 | Edited by MARC Bot | import existing book |
June 1, 2012 | Edited by AMillarBot | remove series from title (Proceedings of Spie--the International Society for Optical Engineering, Vol 775) |
April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
December 11, 2009 | Created by WorkBot | add works page |