Advances in resist technology and processing XV

23-25 February, 1998, Santa Clara, California

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Last edited by ImportBot
August 4, 2020 | History

Advances in resist technology and processing XV

23-25 February, 1998, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
1464

Buy this book

Edition Availability
Cover of: Advances in Resist Technology and Processing XV
Advances in Resist Technology and Processing XV
1998, SPIE-International Society for Optical Engine
Hardcover in English
Cover of: Advances in resist technology and processing XV

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Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Washington
Series
Proceedings SPIE--the International Society for Optical Engineering -- v. 3333., Proceedings of SPIE--the International Society for Optical Engineering -- v. 3333.
Genre
Congresses.

The Physical Object

Pagination
2 v. (xvii, 1464 p.) :
Number of pages
1464

ID Numbers

Open Library
OL19567999M
ISBN 10
0819427780
ISBN 13
9780819427786
OCLC/WorldCat
39634674

Source records

Oregon Libraries MARC record

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History

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August 4, 2020 Edited by ImportBot import existing book
February 8, 2019 Edited by MARC Bot import existing book
August 9, 2010 Edited by Conleth other titles
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 11, 2009 Created by WorkBot add works page