An edition of Microlithography 1999: Advances in Resist Technology and Processing XVI (1999)

Advances in resist technology and processing XVI

Microlithography 1999 : 15-17 March, 1999, Santa Clara, California

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Cover of: Advances in resist technology and processing XVI by Will Conley, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
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Last edited by ImportBot
July 31, 2020 | History
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An edition of Microlithography 1999: Advances in Resist Technology and Processing XVI (1999)

Advances in resist technology and processing XVI

Microlithography 1999 : 15-17 March, 1999, Santa Clara, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
1402

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Subjects
Photoresists, Congresses, Microlithography, Optics

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Edition Availability
Cover of: Microlithography 1999: Advances in Resist Technology and Processing XVI
Microlithography 1999: Advances in Resist Technology and Processing XVI : Proceedings of Spie 15-17 March 1999 Santa Clara, California (Proceedings of SPIE)
June 1999, Society of Photo Optical
Paperback in English
Libraries near you: WorldCat
Cover of: Advances in resist technology and processing XVI
Advances in resist technology and processing XVI: Microlithography 1999 : 15-17 March, 1999, Santa Clara, California
1999, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
SPIE proceedings series -- v. 3678., Proceedings of SPIE--the International Society for Optical Engineering -- v. 3678.
Genre
Congresses.
Other Titles
Microlithography 1999.

The Physical Object

Pagination
2 v. (xv, 1402 p.) :
Number of pages
1402

ID Numbers

Open Library
OL19568077M
ISBN 10
0819431524
ISBN 13
9780819431523
OCLC/WorldCat
41792054

Source records

Oregon Libraries MARC record

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History

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July 31, 2020 Edited by ImportBot import existing book
February 6, 2019 Edited by MARC Bot import existing book
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 11, 2009 Created by WorkBot add works page