An edition of Chemical physics of thin film deposition processes for micro- and nano-technologies (1899)

Chemical physics of thin film deposition processes for micro- and nano-technologies

by and

Chemical physics of thin film deposition proc ...
Y. Pauleau, Yves Pauleau
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Last edited by ImportBot
October 4, 2021 | History
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An edition of Chemical physics of thin film deposition processes for micro- and nano-technologies (1899)

Chemical physics of thin film deposition processes for micro- and nano-technologies

by and

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Publish Date
Publisher
Kluwer Academic Publishers
Language
English
Pages
363

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Subjects

Nanotechnology, Congresses, Thin films, States of matter, Science/Mathematics, Technology, Technology & Industrial Arts, Chemistry - Physical & Theoretical, Engineering - Electrical & Electronic, Material Science, Science-Chemistry - Physical & Theoretical, Technology / Engineering / Electrical, Technology / Material Science, Technology-Material Science, Microelectronics
Edition Availability
Cover of: Chemical physics of thin film deposition processes for micro- and nano-technologies
Chemical physics of thin film deposition processes for micro- and nano-technologies
2002, Kluwer Academic Publishers
in English
Cover of: Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II: Mathematics, Physics and Chemistry, 55)
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies (Nato Science Series II: Mathematics, Physics and Chemistry, 55)
December 31, 1899, Kluwer Academic
Paperback in English - 1 edition

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Book Details

Edition Notes

"Published in cooperation with NATO Scientific Affairs Division."

"Proceedings of the NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano- Technologies, Kaunas, Lithuania, 3-14 September 2001"--T.p. verso.

Includes bibliographical references and index.

Published in
Dordrecht, Boston
Series
NATO science series -- v. 55.
Genre
Congresses.

Classifications

Library of Congress
TA418.9.T45 C47 2002, TA418.9.T45 C47 2002, TA401-492

The Physical Object

Pagination
xiii, 363 p. :
Number of pages
363

ID Numbers

Open Library
OL18180645M
ISBN 10
1402005245, 1402005253
LCCN
2002072962
Library Thing
6571034
Goodreads
5979698
83624

Source records

Oregon Libraries MARC record
Library of Congress MARC record
Library of Congress MARC record
Better World Books record
Better World Books record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
October 4, 2021 Edited by ImportBot import existing book
October 4, 2021 Edited by ImportBot import existing book
December 5, 2020 Edited by MARC Bot import existing book
February 6, 2019 Edited by MARC Bot import existing book
October 11, 2008 Created by ImportBot Imported from Oregon Libraries MARC record