An edition of Rapid thermal and related processing techniques (1991)

Rapid thermal and related processing techniques

2-3 October 1990, Santa Clara, California

Cover of: Rapid thermal and related processing techniques by Rajendra Singh, Mehrdad M. Moslehi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
July 31, 2024 | History
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An edition of Rapid thermal and related processing techniques (1991)

Rapid thermal and related processing techniques

2-3 October 1990, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
422

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Previews available in: English

Subjects

Semiconductor doping, Heat treatment, Vapor plating, Rapid thermal processing, Congresses, Semiconductors, Integrated circuits, Design and construction, Manufacturing processes
Edition Availability
Cover of: Rapid thermal and related processing techniques
Rapid thermal and related processing techniques: 2-3 October 1990, Santa Clara, California
1991, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.
Papers presented at the SPIE Conference on Rapid Thermal and Related Processing Techniques.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1393, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1393.

Classifications

Dewey Decimal Class
621.381/52
Library of Congress
TK7871.85 .R3445 1991

The Physical Object

Pagination
ix, 422 p. :
Number of pages
422

ID Numbers

Open Library
OL1889213M
Internet Archive
isbn_0819404624_1393
ISBN 10
0819404624
LCCN
90050809
OCLC/WorldCat
23606222
Goodreads
3965747

Source records

Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2024 Edited by MARC Bot import existing book
July 26, 2023 Edited by ImportBot import existing book
November 11, 2020 Edited by MARC Bot import existing book
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record