Survey on silicon micromachining and microstructures

Survey on silicon micromachining and microstr ...
Richard Kendall Miller, Richar ...
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Last edited by MARC Bot
November 8, 2020 | History

Survey on silicon micromachining and microstructures

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Publish Date
Language
English
Pages
98

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Edition Availability
Cover of: Survey on silicon micromachining and microstructures
Survey on silicon micromachining and microstructures
1989, Future Technology Surveys
in English

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Book Details


Edition Notes

Includes bibliographical references.
Includes contributions by other researchers.

Published in
Madison, GA
Series
Survey report ;, #17, Survey report (Future Technology Surveys, Inc.) ;, #17.

Classifications

Library of Congress
HD9696.A3 U568 1989

The Physical Object

Pagination
98 leaves :
Number of pages
98

Edition Identifiers

Open Library
OL2070496M
ISBN 10
1558651020
LCCN
88084050
OCLC/WorldCat
24547026

Work Identifiers

Work ID
OL735890W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 8, 2020 Edited by MARC Bot import existing book
April 25, 2011 Edited by OCLC Bot Added OCLC numbers.
December 9, 2009 Edited by WorkBot link works
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record