An edition of Plasma electronics (2005)

Plasma electronics

applications in microelectronic device fabrication

by and

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Plasma electronics
T. Makabe
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Last edited by bgimpertBot
April 16, 2010 | History
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An edition of Plasma electronics (2005)

Plasma electronics

applications in microelectronic device fabrication

by and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Taylor&Francis
Language
English
Pages
339

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Previews available in: English

Subjects
Plasma engineering, Mechanical engineering, Science/Mathematics, Physics, Science, Technology & Industrial Arts, Electronics - General, Engineering - Mechanical, Science / Physics, Microelectronics, Plasma (ionized gases), Engineering, Technique des plasmas, TECHNOLOGY & ENGINEERING, Mechanical

Showing 6 featured editions. View all 6 editions?

Edition Availability
Cover of: Plasma Electronics
Plasma Electronics: Applications in Microelectronic Device Fabrication
2016, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Plasma Electronics
Plasma Electronics: Applications in Microelectronic Device Fabrication
2006, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Plasma Electronics
Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)
March 27, 2006, Taylor & Francis
Hardcover in English
Libraries near you: WorldCat
Cover of: Plasma electronics
Plasma electronics: applications in microelectronic device fabrication
2006, Taylor&Francis
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Plasma Electronics
Plasma Electronics
2006, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Plasma electronics
Plasma electronics: applications in microelectronic device fabrication
2005, Taylor&Francis
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographical references and index.

Published in
New York
Series
Series in plasma physics

Classifications

Dewey Decimal Class
621.044
Library of Congress
TA2020 .M35 2006

The Physical Object

Pagination
339 p.
Number of pages
339

ID Numbers

Open Library
OL22729255M
ISBN 10
0750309768
Goodreads
186205

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
December 15, 2009 Edited by WorkBot link works
December 19, 2008 Created by ImportBot Imported from University of Toronto MARC record